Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
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出版社: North-Holland(c1983.)
ISBN-10: 0444007822 ISBN-13: 9780444007827